Products Portfolio
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Furnace Processing Systems
Diffusion, oxidation and LPCVD furnace processing systems for semiconductor and solar applications.
ASTRA Control System
RCH Associates' flagship product that provides total programming, operation and data management of diffusion and LPCVD furnace processing systems. Provides full computer power per tube-level with graphical, Touch Screen program access.
Available Processes
A listing of diffusion, oxidation and LPCVD processes available from RCH Associates.
Source Gas Cabinets and Source/Vacuum Pump Cabinets
Fully facilitated gas source cabinets configured for atmospheric or LPCVD processes.
Stand-alone or stacked pump cabinets with vacuum pump and control systems.
Gas Systems and Liquid Source Delivery Systems
Gas systems and liquid source delivery systems for diffusion and LPCVD processing.
Custom fabrication and assembly for specialized applications.
VAF - Vacuum Annealing Furnace System
Specialized vacuum furnace system for thin film thermal processing of wafers and substrates that are sensitive to oxidation.
Applicable to metalization anneal/alloy and anneal of antireflective solar cell coatings and other materials.
Paddle and twin rod cantilever loading systems, push/pullers and auto lifters.
Retrofits and Components
Atmospheric and LPCVD processing systems retrofitable to most existing and new furnace system.
"Fast Flange" assemblies, elements and gas systems. Quartz and silicon carbide componentns. Replacement and spare parts.
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