News and Events

November 2010

RCH Associates developes Furnace Processing Systems for solar cell manufacturing.

With 20 years experience in diffusion processes, RCH has adapted the Model 5644 furnace system for the deposition of phosphorous for solar emitters. The Model PV-6 Furnace System provides precise POCl₃ processing for up to 400, 125mm square or pseudo-square substrates per batch/per tube level. The larger PV-8 Furnace System is configured for processing 400, 156mm substrates per batch/per tube-level.

Both models are 4-stack furnace banks that are capable of producing as many as 3600 substrates per shift. In addition, the furnace units may be used for other processes such as thermal oxide, LPCVD poly/amorphous silicon and LPCVD silicon nitirde associated with solar cell manufacturing.

December 2010

RCH Associates publishes new website at www.rchassociates.com. The site provides information on products, services and technologies offerd by the company.

February 2011
 

RCH Associates expands product portfolio to include small batch furnace systems including bench top models. Designed for research, pilotline and education applications, the systems are versatile, powerful and cost-effective.

Systems for up to 200mm diameter wafers and 125 and 156mm square substrates are avialable for custom or standard LPCVD, oxidation and diffusion processes.

Features include partitioned units with all components in a single, small footprint that are easy to install and operate.